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Gas Diaphragm Valve×KITZ SCT Corporation - List of Manufacturers, Suppliers, Companies and Products

Gas Diaphragm Valve Product List

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High-pressure compatible high-purity gas diaphragm valve "NRD Series"

Adoption of a springless diaphragm structure reduces particles! We have a lineup of high-flow types.

The "NRD Series" is a high-pressure diaphragm valve that adopts a new high-output actuator and an internal screw body structure, pursuing a simple and compact design. As a valve that can handle high pressure, it offers a wide range of flow rates from low to high flow types. The entire series features a springless diaphragm structure, reducing particles. 【Features】 ■ Slim and compact design ■ Lineup of high-flow types ■ Adoption of springless diaphragm structure ■ Compatible with high-pressure gas minister certification (optional) ■ Special specifications and block valve compatibility (optional) *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-pressure compatible high-purity gas diaphragm valve "VRD Series"

For high-pressure gas lines and internal piping in semiconductor manufacturing processes! The height of all sizes has been reduced by 6mm compared to conventional products, making them more compact.

The "VRD Series" is a 1/4" high-pressure direct diaphragm valve that supports an enclosed gas pressure of 20.6 MPa. Maintaining the same performance as the conventional "RD Series," it reduces the number of components to achieve a lower price. The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact. It can be used in gas lines and piping within equipment where complete prevention of high pressure and high vacuum retention, as well as leakage to the outside air, is desired. 【Features】 ■ Supports enclosed gas pressure of 20.6 MPa ■ Achieves a lower price by reducing the number of components while maintaining the same performance as the conventional model ■ Reduces operating torque compared to the "RD Series" ■ The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact ■ Easier to use than ever due to low torque and compact design *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.

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High-purity liquid gas diaphragm valve "WD"

Capable of handling high-purity liquid materials for semiconductor manufacturing! A valve with high-performance characteristics of a diaphragm valve!

The "WD" is a diaphragm valve that can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids. While maintaining the basic characteristics of the valve, particle performance, and purge characteristics, it allows for the replacement of the seat (ASSY) component on the user side. Additionally, it has an actuator diameter of φ39.7mm and is compatible with a line pitch of 40mm. 【Features】 ■ Can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids ■ Allows for the replacement of the seat (ASSY) component on the user side while maintaining purge characteristics and other features ■ Effective in improving maintenance performance and reducing running costs for sealing valves of material containers ■ The seat (ASSY) replacement tool is common with the "WD4 manual valve series" ■ Compatible with a line pitch of 40mm with an actuator diameter of φ39.7mm *For more details, please refer to the PDF document or feel free to contact us.

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High-pressure gas compatible high-purity gas diaphragm valve "RD Series"

We have achieved compact design and low torque for our high-pressure diaphragm valve! Manual and automatic valves are available!

The "RD Series" is a diaphragm valve that, while capable of handling high pressure, achieves compactness and low torque. The "manual valve" features a smooth operational feel and employs a large window and easily visible OPEN/CLOSE indicators to allow for immediate confirmation of the open/closed status. The "automatic valve" enhances the rigidity of the connection between the body and actuator, improving reliability, and incorporates a patented wedge-type amplification mechanism, resulting in a compact and highly durable actuator. 【Features】 <Manual Valve> ■ Adoption of a large wheel handle for a smooth operational feel ■ Large window and easily visible OPEN/CLOSE indicators for immediate confirmation of the open/closed status *For more details, please refer to the PDF document or feel free to contact us.

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